SCIOS 2 dualbeam FIB-SEM

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université de sherbrooke (logo) (2)

Manufacturer and model : ThermoFisher SCIOS 2 Dualbeam FIB-SEM

External website : 3iT materials

Contact person : Frédéric Voisard

Part of RQMÉM : yes

Address 3000, University Blvd, Sherbrooke, QC J1K 0A5

Versatile and high performing for material science, engineering, semiconductor failure analysis and quality control. Dual beam electron microscope combining scanning electron microscopy (SEM) and focalized ion beam (FIB).

Detectors, cameras and spectrometers :

  • Secondary electrons and filtered secondary electrons (in lens)

  • Backscattered electrons

  • Segmented transmission annular

  • X Ray Spectroscopy

Specifications :

  • FEG Schottky Canon

Applications :

E-T, surface, topology, composition contrast, thin films, cartography

Performing for sample preparation and three dimension subsurface characterization of a wide variety of samples. Adapted for magnetic and non-conductive samples.

High resolution imagery and high voltage milling as well as good low voltage performances, allowing the preparation of high quality lamellae for transmission electron microscopes.

Backscattered electron detector (BSE) allows for better contrast material imaging.

Adapted for academic, industrial and governmental research.

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