MEB Hitachi SU3500 cartographie 3D

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Université McGill – McGill Materials Characterization (MMC)

Manufacturer and model : Microscope électronique à balayage (MEB) Hitachi SU3500

External website : McGill

Contact person : Philippe Ouzilleau

Part of RQMÉM : no

Address M.H. Wong Building, 3610, University Street, Montreal, QC H3A 0C5

Cartographie 3D quantititative de la surface d’un spécimen, incluant les surfaces complexes

Resolution : 3 nm at 30 kV, 7 nm at 3kV

Detectors, cameras and spectrometers :

  • Secondary electrons (SE), backscattered electrons (BSE), energy dispersion X-ray spectroscopy (EDX), electron backscatter diffraction (EBSD).

Specifications :

  • Equipped with a variable pressure mode (VPSEM) going from 6 to 650 Pa.

  • Stereoscopic image function.

  • low aberation objective lens and improved bias function that provide higher emission current at low accelerating voltage (kV).

  • Excellent image sharpness (S/N) at low accelerating voltages.

  • Robust condenser lens abating field of view or focus deviations during accelerating voltage and probe current condition adjustements. Theses imaging efficiency gains simply the overall imaging optimization process.

Applications :

Scanning electron microscope for quantitative 3D mapping on a sample surface, studying complexe surfaces, micro-detection of elements and crystal orientations.

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