Microscope électronique à balayage Quattro

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Polytechnique Montréal – Centre de caractérisation microscopique des matériaux (CM)2

Manufacturer and model : Thermo Fisher Scientific Quattro S Microscope électronique à balayage

External website : (CM)2

Contact person : Philippe Plamondon

Part of RQMÉM : yes

Address : Main building (A), 2900, Édouard-Montpetit Blvd, Montreal, QC H3T 1J4

Resolution : 1.0 nm at 30 kV, 3.0 nm at 1kV

Detectors, cameras and spectrometers :

  • secondary electrons detector that can filter collected electrons' energy (EDS)

  • Heating and cooling plate

Characteristics

  • Acceleration voltage from 0.1 kV to 30 kV

  • Variable pressure mode (up to 400 Pa of water vapor or nitrogen)

  • Environmental mode (up to 2600 Pa of water vapor or 4000 Pa of nitrogen)

  • Possibility to apply current to the sample to reduce energy of the incident electrons

  • Deposition system for platinium and carbon by eletron beam (GIS)

Softwares

  • AutoScript to automate MEB operation

  • Maps for mosaics aquisitions

Applications :

This extremely versatile microscope can observe any type of sample.

The heating and cooling plate allows in situexperiments. The operation can be automated and many parameters are tracked (temperature, stage position, pressure, etc.)

Variable accelerating voltage facilitates both beam sensitive sample for surface imagery (low accelerating voltage), and conductive sample for high resolution microscopy, for composite information (high accelerating voltage).

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